BAS ISO 17973:2025
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
General Information
Status: Published
No. of pages: 15
Language: English
Edition: 3.
Adoption method: Republication
Publication date: 23.05.2025
Technical committee:
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Abstract
This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.
It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Lifecycle
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Original document and degree of correspondence
- ISO 17973:2024, identical